上海集(ji)(ji)成(cheng)電(dian)路(lu)(lu)(lu)研發中(zhong)心有(you)限公(gong)(gong)司(ICRD)成(cheng)立(li)(li)于2002年,是國家支持組建(jian)、產學(xue)研合作的(de)集(ji)(ji)成(cheng)電(dian)路(lu)(lu)(lu)研發中(zhong)心。ICRD由中(zhong)國集(ji)(ji)成(cheng)電(dian)路(lu)(lu)(lu)相關企業集(ji)(ji)團和高校聯(lian)合投資組建(jian)而成(cheng),是一個獨立(li)(li)的(de)面向全行業集(ji)(ji)成(cheng)電(dian)路(lu)(lu)(lu)企業、大學(xue)及(ji)研究所開放的(de)公(gong)(gong)共研發機構。
上(shang)海集(ji)成(cheng)(cheng)電(dian)(dian)(dian)路(lu)研(yan)(yan)(yan)發中心聚焦(jiao)集(ji)成(cheng)(cheng)電(dian)(dian)(dian)路(lu)主流技術(shu)(shu)路(lu)線(xian),致力于解(jie)決重(zhong)大共(gong)性技術(shu)(shu)的(de)研(yan)(yan)(yan)發及(ji)服(fu)務支撐問題,并(bing)為自(zi)主可控(kong)產(chan)業(ye)鏈建設提(ti)(ti)(ti)供公共(gong)的(de)裝(zhuang)備和(he)材料(liao)驗證(zheng)平臺。ICRD的(de)主要功能(neng)包括:為集(ji)成(cheng)(cheng)電(dian)(dian)(dian)路(lu)企(qi)業(ye)和(he)研(yan)(yan)(yan)發單位提(ti)(ti)(ti)供前(qian)端器件及(ji)工藝技術(shu)(shu)的(de)前(qian)期研(yan)(yan)(yan)發和(he)產(chan)品級驗證(zheng);為集(ji)成(cheng)(cheng)電(dian)(dian)(dian)路(lu)裝(zhuang)備和(he)材料(liao)提(ti)(ti)(ti)供研(yan)(yan)(yan)制(zhi)到上(shang)線(xian)的(de)驗證(zheng)和(he)工藝配套;為集(ji)成(cheng)(cheng)電(dian)(dian)(dian)路(lu)生產(chan)線(xian)升級提(ti)(ti)(ti)供知(zhi)識產(chan)權和(he)技術(shu)(shu)轉移(yi);為國內設計(ji)企(qi)業(ye)研(yan)(yan)(yan)制(zhi)芯片(pian)提(ti)(ti)(ti)供特色(se)工藝和(he)共(gong)享IP核服(fu)務;為企(qi)業(ye)及(ji)高校提(ti)(ti)(ti)供培養(yang)集(ji)成(cheng)(cheng)電(dian)(dian)(dian)路(lu)技術(shu)(shu)人才和(he)高技能(neng)人才的(de)實訓基地。
上海(hai)集成(cheng)電路研發(fa)(fa)中心位于上海(hai)市(shi)張江(jiang)高科技園區,地理(li)位置(zhi)毗鄰華(hua)力微(wei)電子和(he)中芯國際。ICRD建有12英寸開(kai)放式集成(cheng)電路工(gong)藝研發(fa)(fa)和(he)裝備材料試驗平臺,凈化面積超過3000平方(fang)米,研發(fa)(fa)環境及管理(li)系統(tong)和(he)大生產線匹配,可實現硅(gui)片無(wu)沾污進出和(he)工(gong)藝流(liu)程(cheng)無(wu)縫銜(xian)接,加快了技術研發(fa)(fa)和(he)驗證速度。ICRD擁有浸沒式193nm光(guang)刻(ke)機、硅(gui)刻(ke)蝕(shi)機、原子層薄(bo)膜生長(ALD)、高能(neng)離子注入機以(yi)及全套銅(tong)互(hu)連和(he)Low-K等(deng)工(gong)藝設備,工(gong)藝研發(fa)(fa)能(neng)力可達(da)14納米以(yi)下。
上海集成電路研(yan)發中心擁有(you)一批來自國(guo)際研(yan)發機構和(he)跨國(guo)公(gong)司的(de)研(yan)究人(ren)員,并通過國(guo)內外產業(ye)合(he)作持續培養和(he)鍛煉了(le)(le)一支擁有(you)自主工藝技術提升能力的(de)研(yan)發隊伍,為中國(guo)集成電路產業(ye)的(de)自主可控持續發展(zhan)提供了(le)(le)中堅力量。ICRD掌(zhang)握了(le)多個技(ji)術代的工(gong)(gong)(gong)(gong)藝(yi)(yi)技(ji)術和知識產(chan)(chan)權(quan),為中國集成電路生(sheng)產(chan)(chan)線(xian)的建設(she)提(ti)供(gong)了(le)多套技(ji)術轉移和服務(wu);通過(guo)設(she)立(li)產(chan)(chan)業界(jie)共性技(ji)術研(yan)(yan)發(fa)(fa)項(xiang)目,進行FinFET器件(jian)(jian)及工(gong)(gong)(gong)(gong)藝(yi)(yi)、FDSOI關鍵工(gong)(gong)(gong)(gong)藝(yi)(yi)、5nm以(yi)下納米線(xian)晶體管等新(xin)器件(jian)(jian)和工(gong)(gong)(gong)(gong)藝(yi)(yi)技(ji)術的聯合研(yan)(yan)發(fa)(fa);開展產(chan)(chan)學研(yan)(yan)合作(zuo),研(yan)(yan)發(fa)(fa)STT-MRAM、晶體管級3D堆疊、量子點傳(chuan)感器、類神經元晶體管等前沿技(ji)術和產(chan)(chan)品;通過(guo)以(yi)精湛(zhan)工(gong)(gong)(gong)(gong)藝(yi)(yi)帶動(dong)(dong)裝(zhuang)備(bei)和材(cai)料研(yan)(yan)發(fa)(fa)評價的方式(shi),為國產(chan)(chan)光刻(ke)機、刻(ke)蝕(shi)機、銅互連(lian)、光刻(ke)膠、大硅(gui)片等裝(zhuang)備(bei)和材(cai)料提(ti)供(gong)驗(yan)證和工(gong)(gong)(gong)(gong)藝(yi)(yi)配套,推動(dong)(dong)供(gong)應鏈的國產(chan)(chan)化。